High cycle deflection beam MEMS devices

Details High cycle deflection beam MEMS devices High cycle deflection beam MEMS devices

2006-02-14

2006-02-14

Enad, Elvin G. (Department: 2832)

Electricity: magnetically operated switches, magnets, and electr

Electromagnetically actuated switches

Polarity-responsive

C200S181000

Reexamination Certificate

active

06998946

ABSTRACT:
A high life cycle MEMS device is provided by the invention. The inventors have recognized that the deflection beam or deflection beams of an MEMS shunt switch are a failure point in need of improvement. In an aspect of the invention, at least a portion of the signals in the grounded state of an MEMS shunt switch are bypassed to ground on a path that avoids the deflection beam(s) supporting the movable pad. In a preferred embodiment, ground posts are disposed to contact the movable pad in an actuated position and establish a signal path from a signal line to ground. The inventors have also recognized that a shape of deflection beams near their anchor point contributes to failures. In another preferred aspect of the invention, an anchoring portion of the deflection beam or deflection beams is generally coplanar with the remaining portion of the deflection beam(s). An additional post beneath the anchoring portion of the deflection beam(s) permits deflection beam(s) lacking any turns that form a weak structural point.

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