High contrast inspection and review of magnetic media and heads

Details High contrast inspection and review of magnetic media and heads High contrast inspection and review of magnetic media and heads

2005-08-30

2005-08-30

Lee, John R. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Methods

C250S310000, C369S101000

Reexamination Certificate

active

06936816

ABSTRACT:
One embodiment disclosed relates to a method for inspecting or reviewing a magnetized specimen using an automated inspection apparatus. The method includes generating a beam of incident electrons using an electron source, biasing the specimen with respect to the electron source such that the incident electrons decelerate as a surface of the specimen is approached, and illuminating a portion of the specimen at a tilt with the beam of incident electrons. The specimen is moved under the incident beam of electrons using a movable stage of the inspection apparatus. Scattered electrons are detected to form image data of the specimen showing distinct contrast between regions of different magnetization. The movement of the specimen under the beam of incident electrons may be continuous, and data for multiple image pixels may be acquired in parallel using a time delay integrating detector.

REFERENCES:
patent: 6759654 (2004-07-01), Mankos et al.

Affiliated with

Also associated with

Rating

High contrast inspection and review of magnetic media and heads does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with High contrast inspection and review of magnetic media and heads, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and High contrast inspection and review of magnetic media and heads will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3523350