Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Reexamination Certificate
2006-04-28
2011-10-11
Lee, Sin J. (Department: 1722)
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Radiation sensitive composition or product or process of making
C430S271100, C430S272100, C430S273100, C430S311000, C430S313000, C430S325000, C430S326000, C430S330000, C430S907000, C430S910000, C526S242000, C526S245000, C526S248000, C526S279000, C526S281000, C526S282000, C526S288000, C526S328000, C526S328500, C526S329400, C556S009000, C556S012000
Reexamination Certificate
active
08034532
ABSTRACT:
A topcoat material for application on top of a photoresist material is disclosed. The topcoat material comprises an acid-inert compound. The topcoat material also comprises a polymer or an oligomer or a cage structure which shows negligible intermixing with the imaging layer and is soluble in aqueous base developer. A method of forming a patterned material layer on a substrate and a coated substrate comprising the topcoat material is also disclosed.
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Allen Robert David
Brock Phillip Joe
Larson Carl E.
Sooriyakumaran Ratnam
Sundberg Linda Karin
International Business Machines - Corporation
Lee Sin J.
Norris McLaughlin & Marcus P.A.
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