High brightness electron probe beam and method

Details High brightness electron probe beam and method High brightness electron probe beam and method

1979-01-18

1980-07-01

Dixon, Harold A.

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

250397, 250492R, G01M 2300

Patent

active

042108063

ABSTRACT:
A high brightness electron probe beam is formed by generating an electron beam with an electron gun operated in a high current emission configuration, selecting the region of the cross-over having the highest brightness and then limiting contributions to the final beam of a demagnification column to electrons originating only from this region of the cross-over.

REFERENCES:
patent: 2494442 (1950-01-01), Le Poole
patent: 3283120 (1966-11-01), Spruck
patent: 3491236 (1970-01-01), Newberry

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