Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent
1992-12-08
1993-12-07
Powell, William A.
Adhesive bonding and miscellaneous chemical manufacture
Delaminating processes adapted for specified product
Delaminating in preparation for post processing recycling step
156643, 156656, 1566611, B44C 122, C23F 100
Patent
active
052680681
ABSTRACT:
An improved metal mask-making process is disclosed which involves starting with a metal mask having etched apertures using existing processes and coating it conformably with a substantially thick layer, so as to reduce the minimum aperture size while increasing the metal mask thickness. The conformal layer is chosen for minimum stress, good adhesion and thermal compatibility to the original metal mask material. Additional thin conformal coatings can be provided for imparting mechanical and chemical resistance to the metal mask.
REFERENCES:
patent: 2226381 (1940-12-01), Norris
patent: 2226384 (1940-12-01), Norris
patent: 3476658 (1969-11-01), Corwin
patent: 3862018 (1975-01-01), Mentone
patent: 4603056 (1986-07-01), MacKinnon et al.
patent: 4818661 (1989-04-01), Taylor et al.
IBM Technical Disclosure Bulletin, vol. 18, No. 9, Feb. 1976, "Dimensionally Stable, Metal Mask Fabrication Process", by J. Crimi, et al.
IBM Technical Disclosure Bulletin, vol. 31, No. 6, Nov. 1988, "Method for Laser Etching a Composite Mask," by R. Hodgson, et al.
IBM Technical Disclosure Bulletin, vol. 25, No. 3B, Aug. 1982, "Metal Mask Replacement and Improvement," by R. Feder, et al.
IBM Research Disclosure, May 1990, N. 313, "RIE Made Molybdenum Mask," by C. C. Kin, et al.
Cowell Donald R.
Jones Mark W.
Kin Chang-Ching
Nahlik John J.
Trumpetto John A.
Huberfeld Harold
International Business Machines - Corporation
Powell William A.
Srikrishnan Kris V.
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