High-accuracy position comparator using 2 dimensional grating

Details High-accuracy position comparator using 2 dimensional grating High-accuracy position comparator using 2 dimensional grating

1991-06-13

1992-08-25

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

356356, H01J 314

Patent

active

051421461

ABSTRACT:
A high-accuracy position comparator includes a length-measuring grating having a ruling extending two-dimensionally, a reflecting device, an index grating having the ruling following the same direction as that of the length-measuring grating, a grating overlapping optical system comprised of a projecting device for projecting an image of one of these two gratings and an imaging device for forming the image through the reflecting device, a fringe detecting device for detecting interference fringes produced by the optical system, and a measuring position detecting device. Thus, the comparator has practically important advantages of being able to make two-dimensional measurement and positional comparison without resetting an object being measured.

REFERENCES:
patent: 3891321 (1975-06-01), Hock
patent: 4656347 (1987-04-01), Une et al.
patent: 4991962 (1991-02-01), Jain
patent: 4998823 (1991-03-01), Kitajima

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