High accuracy, high flexibility energy beam machining system

Details High accuracy, high flexibility energy beam machining system High accuracy, high flexibility energy beam machining system

1991-09-13

1992-09-08

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156630, 156631, 156633, 156643, 156657, 156663, 2191212, B44C 122

Patent

active

051455510

ABSTRACT:
A high precision system for machining substrates by means of an energy beam includes real time digital signal processor control and a deflection system providing control, within a predetermined field of the substrate, of the angle at which the beam machines the substrate. An electron beam is used in a vacuum chamber in a preferred embodiment. The system also includes an x-y table for positioning the substrate and may have provision for detecting the x-y position and angular misregistration of the substrate. Dynamic forms and stigmator control may be used to produce a uniform beam within the field. The system allows a high speed vector machining process, which optimizes the overall system throughput by minimizing the settling time of the deflection system.

REFERENCES:
patent: 3134010 (1964-05-01), Bettermann et al.
patent: 4878002 (1989-10-01), Heatzig et al.
Digital Computer Applications to Process Control, Van Nauta Lemke, ed. 1977, pp. 655-662, "Computer Numerical Control of Electron Beam Machining Equipments".
Computer Designs Sep. 15, 1987, pp. 87-92.
Multiple DSPs provide speed for digital servo control.
Nuclear Instrum. and Methods in Phys. Res./B B37/38 (1989) Feb. (II), No. 2, Amsterdam, NL "New Computer Control System for the High Current Ion Implanter PR-80", pp. 548-551.
Optical Engineering 27(1988) Feb., No. 2, Bellingham, WA, USA pp. 143-149, Electron beam lithography and nanometer structures: fabricator of microzone plates.

Affiliated with

Also associated with

Rating

High accuracy, high flexibility energy beam machining system does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with High accuracy, high flexibility energy beam machining system, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and High accuracy, high flexibility energy beam machining system will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-132075