Heterocycle-bearing onium salts

Details Heterocycle-bearing onium salts Heterocycle-bearing onium salts

2007-11-20

2010-11-16

Dentz, Bernard (Department: 1625)

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Radiation sensitive composition or product or process of making

C522S031000, C549S023000, C549S283000, C549S392000

Reexamination Certificate

active

07833691

ABSTRACT:
The present invention relates to a heterocycle-containing onium salt useful as, for example, a cationic photopolymerization initiator and an acid generator for a chemically amplified resist, and provides a heterocycle-containing onium salt shown in the specification.

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