Electrical generator or motor structure – Dynamoelectric – Linear
Reexamination Certificate
2007-02-27
2007-02-27
Lam, Thanh (Department: 2834)
Electrical generator or motor structure
Dynamoelectric
Linear
Reexamination Certificate
active
10704534
ABSTRACT:
An actuator for positioning of an optical element, such as a mirror, in an optic system that operates under vacuum conditions is provided and includes a first actuator body including a first actuator element that is hermetically sealed in the first actuator body and a second actuator body that includes a second actuator element that is hermetically sealed in the second actuator body. The first and second actuator bodies are hermetically sealed using any number of techniques including a welding process. Moreover, in one embodiment, the actuator operates under the Lorentz principle and the first actuator element is a magnet or magnet assembly and the second actuator element is a coil assembly with the first and second actuator bodies being free of attachment to one another.
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Broers Sanders
Koorneef Lucas
van Aert Joroen
van Deuren Frans
Carl Zeiss SMT AG
Darby & Darby
Lam Thanh
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