Hemispherical silicon grain capacitor with variable grain size

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Reexamination Certificate

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Details

C257S068000, C257S295000, C257S905000, C257S534000, C257SE21647, C438S665000

Reexamination Certificate

active

11165034

ABSTRACT:
A semiconductor device includes cylindrical capacitors each including corresponding cylindrical electrodes. Each cylindrical electrode includes hemispherical silicon grains. The hemispherical silicon grains protruding from an upper region of the cylindrical electrode have a large size, and the hemispherical silicon grains protruding from a lower region of the cylindrical electrode have a small size or the lower region of the cylindrical electrode has no hemispherical silicon grains.

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patent: 6150216 (2000-11-01), Lin et al.
patent: 6399439 (2002-06-01), Yamanishi et al.
patent: 6537872 (2003-03-01), Tsao et al.
patent: 2004/0053474 (2004-03-01), Shin et al.
patent: 2000-196042 (2000-07-01), None
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patent: 2001-196562 (2001-07-01), None
patent: 2002-222871 (2002-08-01), None
patent: 2002-334940 (2002-11-01), None
patent: 2002-368133 (2002-12-01), None
patent: 2003/0056805 (2003-07-01), None

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