Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate
2007-11-20
2007-11-20
Purvis, Sue A. (Department: 2826)
Active solid-state devices (e.g., transistors, solid-state diode
Field effect device
Having insulated electrode
C257S068000, C257S295000, C257S905000, C257S534000, C257SE21647, C438S665000
Reexamination Certificate
active
11165034
ABSTRACT:
A semiconductor device includes cylindrical capacitors each including corresponding cylindrical electrodes. Each cylindrical electrode includes hemispherical silicon grains. The hemispherical silicon grains protruding from an upper region of the cylindrical electrode have a large size, and the hemispherical silicon grains protruding from a lower region of the cylindrical electrode have a small size or the lower region of the cylindrical electrode has no hemispherical silicon grains.
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Ikeda Noriaki
Kakehashi Eiichiro
Kitajima Hiroyasu
Kitamura Hiroyuki
Nakamura Yoshitaka
Elpida Memory Inc.
Purvis Sue A.
Wilson Scott R.
Young & Thompson
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