Heating furnace for semiconductor wafers

Details Heating furnace for semiconductor wafers Heating furnace for semiconductor wafers

1988-07-25

1990-09-04

Walberg, Teresa J.

F27B 514

Patent

active

049546856

ABSTRACT:
A heating furnace for semiconductor wafers having a heater arranged around a core tube, layers of a heat insulating material made of a porous heat insulating material or ceramic fibers arranged around the heater, and layers of a heat reflecting material arranged in the layers of the heat insulating material.

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