Heating device, method of manufacturing the same, and processing

Details Heating device, method of manufacturing the same, and processing Heating device, method of manufacturing the same, and processing

1995-09-27

1999-05-18

Walberg, Teresa

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

219544, 427592, 29611, H05B3/68;3/00

Patent

active

059048727

ABSTRACT:
A heating device is formed by a heating plate formed of silica and having a heating surface for heating an object to be heated, a heating element having a predetermined pattern and fixed to a surface opposing the heating surface of the heating plate, and a reflecting plate formed of silica and brought into tight contact with the surface of the heating plate on which the heating element is formed. This heating device is arranged in a processing vessel in a CVD apparatus, and a semiconductor wafer is placed on the heating device. A process gas is supplied into the processing vessel while the semiconductor wafer is heated, thereby forming a predetermined film on the semiconductor wafer.

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