Heating device for semiconductor wafers

Details Heating device for semiconductor wafers Heating device for semiconductor wafers

1998-05-14

1999-07-27

Pelham, Joseph

Electric resistance heating devices

Heating devices

Radiant heater

219405, 219411, 392411, C23C 1600, H05B 306, G21K 500

Patent

active

059304561

ABSTRACT:
An apparatus for heat treating semiconductor wafers is disclosed. The apparatus includes a heating device which contains an assembly of light energy sources for emitting light energy onto a wafer. In particular, the light energy sources are positioned such that many different radial heating zones are created on a wafer being heated. For instance, in one embodiment, the light energy sources form a spiral configuration. In an alternative embodiment, the light energy sources appear to be randomly dispersed with respect to each other so that no discernable pattern is present. In a third alternative embodiment of the present invention, the light energy sources form concentric rings. Tuning light sources are then placed in between the concentric rings of light.

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