4. Electric resistance heating devices
  5. Heating devices
  6. Radiant heater

Steven R. Vosen

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Heating device for semiconductor wafers

Electric resistance heating devices – Heating devices – Radiant heater
Patent

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Low pressure stagnation flow reactor with a flow barrier

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1076711

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