Heating apparatus with multilayer insulating structure

Details Heating apparatus with multilayer insulating structure Heating apparatus with multilayer insulating structure

1993-01-28

1994-06-21

Reynolds, Bruce A.

Electric resistance heating devices

Heating devices

Radiant heater

219390, 373137, 110336, H05B 364, F27D 100

Patent

active

053234847

ABSTRACT:
A heating apparatus including a process tube in which the target objects are arranged in an internal heating area and a multilayer insulating structure arranged so to enclose the process tube. At the inner face of an inorganic molded structure of bulk density 0.3-0.8 g/cm.sup.3, an inorganic insulating layer of bulk density 1.0-2.0 g/cm.sup.3 covered on the inner face or all faces thereof by inorganic cloth is provided to form the multilayer insulating structure. The inner face of the inorganic insulating layer is used to support a heat generating means. A cooling means is also provided for cooling the flat heating area of the process tube. As a result, a heating apparatus of the present invention is provided that features excellent endurance against spalling, deterioration and chemical reaction, and which is capable of long term stability with respect to temperature increase and decrease.

REFERENCES:
patent: 3735008 (1973-05-01), Ieda et al.
patent: 4147888 (1979-04-01), Sato
patent: 4493089 (1985-01-01), Abell
patent: 4966201 (1990-10-01), Svec et al.
patent: 5038019 (1991-08-01), McEntire et al.
patent: 5229576 (1993-07-01), Nakao et al.

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