Heater unit

Details Heater unit Heater unit

2007-06-25

2010-12-14

Paik, Sang Y (Department: 3742)

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

C118S725000

Reexamination Certificate

active

07851728

ABSTRACT:
The present invention provides a heater unit which can improve temperature uniformity of a heated object at the time of heating the object. A second heat conductor32which is the radial internal part of shaft22has a lower heat transfer ratio than a first heat conductor30which is the radial external part of shaft22. As a result, in the case where a heated state and a non heated state of the resistance heating element18are repeatedly switched, the movement of heat from the front part22B of the shaft22to the base point part22A is suppressed by the second heat conductor32compared to the first heat conductor30. As a result, in the part which confronts the hollow part42of the shaft22in the heater plate16, the time required to heat the heater plate16and the wafer28to be heated to a desired heating temperature is shortened when compared to a conventional heater unit. Therefore, it is possible to improve the uniformity of the temperature of the wafer28which is to be heated by the heater plate16.

REFERENCES:
patent: 5994678 (1999-11-01), Zhao et al.
patent: 7045747 (2006-05-01), Futakuchiya et al.
patent: 7126093 (2006-10-01), Goto et al.
patent: 2005-216759 (2005-08-01), None

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