4. Spring devices
  5. Coil
  6. Including end thrust member

Toshihiro Tachikawa

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Apparatus for vapor deposition

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Ceramics heater

Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Reexamination Certificate

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Ceramics heater

Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Reexamination Certificate

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Coil spring device

Spring devices – Coil – Including end thrust member
Patent

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Electrostatic chucking stage and substrate processing apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Profile ID: LFUS-PAI-P-462591

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