Heated stage for a scanning probe microscope

Details Heated stage for a scanning probe microscope Heated stage for a scanning probe microscope

1996-10-11

1998-10-13

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

H01J 3720

Patent

active

058215450

ABSTRACT:
A heater for use in heating a sample stage of a microscope such as a scanning probe microscope is bonded to a sample stage which sits on a tube of a ceramic thermal insulator which is, in turn, mounted within or part of a tube of the same material. This re-entrant design provides an increased thermal path over straight line distances between the heater and the support structure for the sample stage and thus provides excellent thermal insulation, while also maximizing the thermal stability of the system.

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