Heating – Work chamber having heating means – Having means by which work is progressed or moved mechanically
Patent
1992-12-07
1995-07-04
Yuen, Henry C.
Heating
Work chamber having heating means
Having means by which work is progressed or moved mechanically
432 5, 432 6, 432241, 432253, F27D 312
Patent
active
054294983
ABSTRACT:
The present invention relates to a thermal processing method wherein a cylindrical process tube that has at one end an entrance/exit is provided at the other end thereof with a heat source, and thermal processing is performed on a workpiece which has been brought in from the entrance/exit of the process tube to a prescribed position therein. This thermal processing method and an apparatus therefor is characterized in that, when the workpiece is moved to the prescribed position, it is first moved to a proximity position that is closer to the heat source than the prescribed position, then it is returned therefrom to the prescribed position. The invention is further characterized in that, if the actual processing temperature at the prescribed position changes while the workpiece is undergoing thermal processing, the workpiece is moved such that the position of the workpiece with respect to the heat generation source is changed in order to return the processing temperature at the prescribed position to the prescribed processing temperature. This ensures that the temperature of the workpiece can be rapidly raised to the prescribed processing temperature and also that, if the temperature of the workpiece should change, it can be rapidly returned to the prescribed processing temperature.
REFERENCES:
patent: 5131842 (1992-07-01), Miyazaki et al.
patent: 5221201 (1993-06-01), Yamaga et al.
patent: 5249960 (1993-10-01), Monoe
Kawachi Satoshi
Okase Wataru
Yagi Yasushi
Tokyo Electron Sagami Kabushiki Kaisha
Yuen Henry C.
LandOfFree
Heat treatment method and apparatus thereof does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Heat treatment method and apparatus thereof, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Heat treatment method and apparatus thereof will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-756363