Heat treatment device

Details Heat treatment device Heat treatment device

1994-06-10

1996-05-07

Hoang, Tu

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

219403, 432 11, F27B 906

Patent

active

055148522

ABSTRACT:
A heat treatment device comprises a table of a thermal conductor located in a housing carrying an object of treatment thereon, and a treatment heat source located in the housing and by the table so that a bottom face of the table is opposite to a top face of the heat source, whereby the object of treatment in heat-treated through the table. An annular groove is formed in the top face of the heat source and evacuated so that the substrate and heat source are securely attached thereby increasing the heat conduction between them.

REFERENCES:
patent: 3601582 (1971-08-01), Boisfleury
patent: 4245613 (1981-01-01), Wells et al.
patent: 4486172 (1984-12-01), Dunning
patent: 5378872 (1995-01-01), Jovanovic

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