Heat treatment apparatus

Details Heat treatment apparatus Heat treatment apparatus

2007-12-25

2007-12-25

Wilson, Gregory (Department: 3749)

Heating

Heating or heat retaining work chamber structure

C219S390000, C118S725000

Reexamination Certificate

active

10528704

ABSTRACT:
The present invention is a thermal processing unit including: a heating-furnace body whose upper end has an opening; a reaction tube consisting of a single tube contained in the heating-furnace body; a gas-discharging-unit connecting portion formed at an upper portion of the reaction tube, the gas-discharging-unit connecting portion having a narrow diameter; a substrate-to-be-processed supporting member for supporting a substrate to be processed, contained in the heating-furnace body; and a heating unit for heating the substrate to be processed supported by the substrate-to-be-processed supporting member. The heating unit has: a first heating portion arranged around the reaction tube, a second heating portion arranged around the gas-discharging-unit connecting portion, a third heating portion arranged around an upper portion of the reaction tube, a fourth heating portion arranged around a lower portion of the reaction tube, and a fifth heating portion arranged under the substrate-to-be-processed supporting member.

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International Preliminary Examination Report (PCT/IPEA/409) (translated) issued for PCT/JP2003/011100.
Notification of Transmittal of Copies of Translation of the International Preliminary Examination Report (PCT/IB/338) issued for PCT/JP2003/011100.

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