Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With workpiece support
Reexamination Certificate
2007-07-31
2007-07-31
Kim, Peter B. (Department: 2851)
Adhesive bonding and miscellaneous chemical manufacture
Differential fluid etching apparatus
With workpiece support
C219S390000
Reexamination Certificate
active
11350766
ABSTRACT:
A processing gas is prevented from entering into a space below a placement table. A supporting surface for supporting the lower face of a placement table is provided at an inner circumferential portion of the upper end of a support column. A circumferentially extending purge gas groove is formed outside the supporting surface, in an intermediate circumferential portion of the upper end of the support column. A narrow flow path is provided outside the purge gas groove, at a position corresponding to an outer circumferential portion of the upper end of the support column. A purge gas diffuses in the circumferential direction in the purge gas groove and flows out to the outside from the narrow flow path. Such a flow of the purge gas prevents a processing gas from entering into the purge gas groove and a space below the placement table.
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Kamaishi Takayuki
Suzuki Kouki
Tanaka Sumi
Kim Peter B.
Oblon & Spivak, McClelland, Maier & Neustadt P.C.
Ohira Marissa A.
Tokyo Electron Limited
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