Heating – Processes of heating or heater operation – Including preparing or arranging work for heating
Patent
1994-05-27
1995-08-29
Dolinar, Andrew M.
Heating
Processes of heating or heater operation
Including preparing or arranging work for heating
432152, 432241, 432206, F27D 500
Patent
active
054455219
ABSTRACT:
A heat treating device including a pressure detecting unit for outputting an output signal when a pressure in a heat processing furnace becomes a set value, an air release pipe having a first valve and a check valve, a differential pressure gauge shut off by a second valve in terms of pressure from the interior of the heat processing furnace, and an air feed pipe having a third valve. One ends of each of the air release pipe and the air feed pipe is connected respectively to the heat processing furnace and the other ends opened in air. In such arrangement, after processing gases are evacuated from the heat processing furnace, an inert gas is fed. Then when an internal pressure of the furnace becomes near an air pressure, the first valve is opened in response to the output signal of the pressure detecting unit to make the internal pressure of the heat processing furnace a little higher than the air pressure. When a differential pressure value of the differential pressure gauge is below a set value, the third value is opened to communicate the interior of the heat processing furnace with air through the air feed pipe. Then the cap closing the opening of the heat processing furnace is opened.
REFERENCES:
patent: 5207573 (1993-05-01), Miyagi et al.
patent: 5271732 (1993-12-01), Yokokawa
patent: 5273424 (1993-12-01), Kobayashi
patent: 5277579 (1994-01-01), Takanabe
patent: 5328360 (1994-07-01), Yokokawa
patent: 5330352 (1994-07-01), Watanabe et al.
Fujihara Kaoru
Kitayama Hirofumi
Matsuo Takenobu
Yamaguchi Eiji
Dolinar Andrew M.
Tokyo Electron Kabushiki Kaisha
Tokyo Electron Tohoku Kabushiki Kaisha
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