Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Reexamination Certificate
2011-04-26
2011-04-26
Chu, John S (Department: 1722)
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Radiation sensitive composition or product or process of making
C430S014000, C430S191000, C430S192000, C430S193000, C430S326000, C430S330000, C430S906000
Reexamination Certificate
active
07932012
ABSTRACT:
A heat resistant photosensitive resin composition having excellent film properties is provided by constituting a photosensitive resin composition containing (A) a polymer having an acid functional group and/or a substituent derived therefrom, (B) a compound having at least one substituent derived from an amine functional group, (C) a photoreactive compound, and (D) a solvent. Using this composition, a pattern with high resolution can be produced, and thus an electronic part having a high quality can be produced.
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Japanese Official Action issued Sep. 2, 2008, in Application No. 2003-054299.
Fujieda Nagatoshi
Komatsu Hiroshi
Nakano Hajime
Antonelli, Terry Stout & Kraus, LLP.
Chu John S
Hitachi Chemical DuPont Microsystems Ltd.
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