Heat-actuated vacuum valve for a particle beam apparatus

Details Heat-actuated vacuum valve for a particle beam apparatus Heat-actuated vacuum valve for a particle beam apparatus

1991-01-04

1992-05-05

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

313 7, H01J 3718

Patent

active

051110547

ABSTRACT:
A heat-actuated valve is inserted between a first vacuum space and a further vacuum space in a particle beam apparatus. The valve is preferably activatable by the temperature required for evacuating first vacuum chamber by heating. Preferably, the valve device itself is also evacuatable by heating; this can be readily realized by avoiding the use of non-metal valve members when the valve is inserted between two spaces wherebetween a compartively small absolute difference in pressure exists, in the closed condition of the valve.

REFERENCES:
patent: 4833362 (1989-05-01), Crewe
patent: 4958801 (1990-09-01), Shopsky
patent: 4973024 (1990-11-01), Homma

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