Abrading – Machine – Rotary tool
Patent
1997-04-04
1999-06-22
Eley, Timothy V.
Abrading
Machine
Rotary tool
451290, 451398, B24B 722
Patent
active
059137185
ABSTRACT:
A chemical mechanical polishing apparatus polishes the surface of a substrate to remove material therefrom. The apparatus includes a carrier, which positions the substrate against the rotating polishing pad. The carrier includes an integral loading member therein, which controls the load force of the substrate against the polishing pad. Multiple substrates may be simultaneously polished on a single rotating polishing pad, and the polishing pad may be rotationally oscillated to reduce the likelihood that any contaminants are transferred from one substrate to another along the polishing pad. A multi-lobed groove in the polishing pad may be used, in conjunction with a moving substrate, to polish the surface of the substrate.
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Applied Materials Inc.
Eley Timothy V.
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