Hard film, method of forming the same and target for hard...

Details Hard film, method of forming the same and target for hard... Hard film, method of forming the same and target for hard...

2007-05-01

2007-05-01

Turner, Archene (Department: 1775)

Compositions: coating or plastic

Coating or plastic compositions

Inorganic materials only containing at least one metal atom

C428S697000, C428S698000, C428S699000, C428S704000

Reexamination Certificate

active

10769913

ABSTRACT:
A hard film is formed of a material having composition indicated by a chemical formula: (TiaAlbVcSidBf) (C1−eNe), in which subscripts a, b, c, d, f and e indicate atomic ratios of Ti, Al, V, Si, B and N, respectively, and meet relational expressions: 0.02≦a≦0.5, 0.4<b≦0.8, 0.05<c, 0≦d≦0.5, 0≦f≦0.1, 0.01≦d+f≦0.5, 0.5≦e≦1 and a+b+c+d=1. The hard film is harder than and more excellent in wear resistance than TiAlN films and conventional (TiAlV) (CN) films.

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