Halo implant in semiconductor structures

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Reexamination Certificate

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Details

C257S347000, C257S344000, C257S316000, C257S324000, C438S286000, C438S524000, C438S302000, C438S217000, C438S162000, C438S289000

Reexamination Certificate

active

06949796

ABSTRACT:
A halo implant method for forming halo regions of at least first and second transistors formed on a same semiconductor substrate. The first transistor comprises a first gate region disposed between first and second semiconductor regions. The second transistor comprises a second gate region disposed between third and fourth semiconductor regions. The method comprises the steps of, in turn, halo-implanting each of the first, second, third, and fourth semiconductor regions, with the other three semiconductor regions being masked, in a projected direction which (i) is essentially perpendicular to the direction of the respective gate region and (ii) points from the halo-implanted semiconductor region to the respective gate region.

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