Half tone phase shift masks with staircase regions and methods o

Details Half tone phase shift masks with staircase regions and methods o Half tone phase shift masks with staircase regions and methods o

1997-06-05

1998-09-29

Rosasco, S.

Radiation imagery chemistry: process, composition, or product th

Radiation modifying product or process of making

Radiation mask

G03F 900

Patent

active

058144242

ABSTRACT:
A phase shift mask includes a phase shift region and an unshifted phase region in spaced apart relation on a phase shift mask substrate, and a half tone region on the unshifted phase region. The half tone region changes the phase of radiation incident thereon. The half tone region preferably defines a staircase region which causes destructive interference of incident radiation which can thereby reduce the critical distance difference between patterns formed with the phase shift region and the unshifted phase region. The phase shift mask may be fabricated by forming a phase shift layer on a phase shift mask substrate and forming a patterned chrome layer on the phase shift layer which exposes a first portion and a second portion of the phase shift layer. A phase shift region is formed in the first portion of the phase shift layer and a half tone region and an unshifted phase region are formed in the second portion of the phase shift layer.

REFERENCES:
patent: 5358827 (1994-10-01), Garofalo et al.
patent: 5418095 (1995-05-01), Vasudev et al.
patent: 5437947 (1995-08-01), Hur et al.
Brown, "Sematech and the National Technology Roadmap : Needs and Challenges", Optical/Laser Microlithography VII, Proceedings/SPIE-The International Society for Optical Engineering, vol. 2440, Feb. 22-24, 1995, pp. 34-35.

Affiliated with

Also associated with

Rating

Half tone phase shift masks with staircase regions and methods o does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Half tone phase shift masks with staircase regions and methods o, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Half tone phase shift masks with staircase regions and methods o will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-684913