Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Patent
1997-12-16
1999-04-20
Westin, Edward P.
Radiant energy
With charged particle beam deflection or focussing
Magnetic lens
250396ML, 3133611, 3133631, G21K 108, H01J 302
Patent
active
058959190
ABSTRACT:
The invention relates to a gun lens for generating a particle beam with a cathode, an extraction electrode, an anode and a condenser lens, wherein a deceleration field is generated between the extraction electrode and the anode and the condenser lens produces a magnetic field which is superimposed on both the cathode, the extraction electrode and the anode.
REFERENCES:
patent: 4825080 (1989-04-01), Troyon
patent: 5041732 (1991-08-01), Saito et al.
patent: 5196707 (1993-03-01), Gesley
patent: 5371371 (1994-12-01), Yamazaki et al.
A. Delong, J. Chmelik, V. Kolarik, J. Komurka, and J. Ocadlik, A New Design of Field Emission Electron Gun with a Magnetic Lens, pp. 103-108 of Optik, (1989) Febr. No. 3, Stuttgart, DE.
Frosien Jurgen
Lanio Stefan
Schonecker Gerald
Advantest Corporation
Wells Nikita
Westin Edward P.
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