Guide wing for a furnace paddle

Details Guide wing for a furnace paddle Guide wing for a furnace paddle

1979-02-05

1980-08-19

Camby, John J.

Heating

Accessory means for holding, shielding or supporting work...

Support structure for heat treating ceramics

432241, 432261, F27D 500

Patent

active

042182140

ABSTRACT:
A furnace paddle adapted to hold semiconductor wafers therein and having means attached thereto for supporting the paddle for movement along the inside of a cylindrically-shaped tube of a semiconductor processing furnace has means attached to the paddle adjacent the supporting means for limiting the lateral movement of the supporting means up the inside wall of the tube. The means includes a guide wing having two ends for contacting respectively the inside wall of the tube at intersecting points of a chord thereof and having a stem attached to the paddle adjacent the supporting means for maintaining the ends proximate the inside wall of the tube.

REFERENCES:
patent: 687508 (1901-11-01), Walker
patent: 3183131 (1965-05-01), Huffman
patent: 3473510 (1969-10-01), Sheng et al.
patent: 3604494 (1971-09-01), Muller
patent: 3705714 (1972-12-01), Alliegro
patent: 3744650 (1973-07-01), Henebry
patent: 3951587 (1976-04-01), Alliegro et al.
patent: 4075972 (1978-02-01), Yamawaki et al.

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