Guide mechanism for aligning a handheld vacuum pickup wand with

Material or article handling – Device for emptying portable receptacle – Nongravity type

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Details

414937, 414938, 414941, 294 641, B66C 102

Patent

active

060536896

ABSTRACT:
A guided vacuum pick-up device for picking up wafers in a wafer storage cassette and a method for using such device. In the device, a vacuum pick-up head is equipped with a guide member which intimately engages a guide bar molded on a wafer storage cassette such that the movement of the vacuum pick-up head can be precisely indexed to the spacing between the adjacent wafers by engaging a guide pin on the guide member to one of a number of positioning grooves provided circumferentially on the guide bar. The device can be used for picking up or putting back wafers in a wafer storage cassette without the danger of scratching or breaking the wafers by accidentally colliding with the wafers.

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patent: 5217273 (1993-06-01), Hendricsen et al.
patent: 5374090 (1994-12-01), Goff
patent: 5799994 (1998-09-01), Tsai et al.
patent: 5928537 (1999-07-01), Fortune

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