Material or article handling – Device for emptying portable receptacle – Nongravity type
Patent
1999-06-01
2000-04-25
Olszewski, Robert P.
Material or article handling
Device for emptying portable receptacle
Nongravity type
414937, 414938, 414941, 294 641, B66C 102
Patent
active
060536896
ABSTRACT:
A guided vacuum pick-up device for picking up wafers in a wafer storage cassette and a method for using such device. In the device, a vacuum pick-up head is equipped with a guide member which intimately engages a guide bar molded on a wafer storage cassette such that the movement of the vacuum pick-up head can be precisely indexed to the spacing between the adjacent wafers by engaging a guide pin on the guide member to one of a number of positioning grooves provided circumferentially on the guide bar. The device can be used for picking up or putting back wafers in a wafer storage cassette without the danger of scratching or breaking the wafers by accidentally colliding with the wafers.
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O'Connor Gerald J.
Olszewski Robert P.
Taiwan Semiconductor Manufacturing Company , Ltd.
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