Guard ring structure for semiconductor devices and process for m

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

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Details

257170, 257339, 257605, H01L 2976, H01L 2994

Patent

active

061277096

ABSTRACT:
A semiconductor device includes a guard ring in the termination area that is formed using the same processing steps that form the active area of the device and without requiring additional masking steps or a passivation layer. The guard ring is formed in an opening in the field oxide located in the termination area and is electrically connected to a polysilicon field plate that is located atop a portion of the field oxide region. The guard ring increases the rated voltage of the device without the introduction of a passivation layer.

REFERENCES:
patent: 5162883 (1992-11-01), Fujihira
patent: 5268586 (1993-12-01), Mukherjee et al.
patent: 5270566 (1993-12-01), Fujihara
patent: 5313088 (1994-05-01), Takahashi et al.
patent: 5583365 (1996-12-01), Villa et al.
patent: 5929485 (1999-07-01), Takahashi

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