Guard ring electrostatic chuck

Details Guard ring electrostatic chuck Guard ring electrostatic chuck

1993-12-20

1995-10-31

Gaffin, Jeffrey A.

Electricity: electrical systems and devices

Electric charge generating or conducting means

Use of forces of electric charge or field

269 8, 279128, H02N 1300

Patent

active

054635250

ABSTRACT:
An electrostatic chuck suppresses the formation of vacuum arcs between the back of the wafer being processed and the body of the chuck by the interposition of a guard ring that floats close to the self-bias potential induced by the plasma on the wafer, thereby capacitively dividing the voltage between the wafer and the closest electrode.

REFERENCES:
patent: 4554611 (1985-11-01), Lewin
patent: 5055964 (1991-10-01), Logan et al.
patent: 5103367 (1992-04-01), Horwitz et al.
patent: 5213349 (1993-05-01), Elliot
patent: 5255153 (1993-10-01), Nozawa et al.
patent: 5350479 (1994-09-01), Collins et al.

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