Growth rate monitor for molecular beam epitaxy

Radiant energy – Inspection of solids or liquids by charged particles – Methods

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

250306, 156601, 156DIG103, G01N 2100

Patent

active

048126500

ABSTRACT:
A light source with appropriate optics focusses light on the wafer surface during deposition, while a nearby collector is biased to collect photoemitted electrons from the growing surface. A pico ammeter can be used to convert the small oscillatory current detected to a substantial voltage signal which can be recorded or processed by computer or other sutiable device. The light must contain wavelengths at energies close to or greater than the energy of the photoemission threshold. The detected photoemitted electron signal has an oscillatory component occurring due to the growth of epitaxial layers. This oscillation has frequency 1/.tau., where .tau. is the monolayer accumulation time.

REFERENCES:
patent: 4096386 (1978-06-01), Rempfer et al.
patent: 4332833 (1982-06-01), Aspnes et al.
patent: 4575462 (1986-03-01), Dobson et al.
J. B. Theeten, "Analysis of a Surface Crystallography of a Solid: LEED and RHEED Techniques", Acta Electronica, 18, 1, 1975, pp. 39-45.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Growth rate monitor for molecular beam epitaxy does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Growth rate monitor for molecular beam epitaxy, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Growth rate monitor for molecular beam epitaxy will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-895180

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.