Growth of beta-sic thin films and semiconductor devices fabricat

Fishing – trapping – and vermin destroying

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437105, 437106, 148DIG148, 156610, 156DIG64, H01L 2120

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049120638

ABSTRACT:
Device quality thin films of Beta-SiC are epitaxially grown on substrates of Alpha-Sic.

REFERENCES:
patent: 2854364 (1958-09-01), Lely
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