Groupwise corrected objective

Details Groupwise corrected objective Groupwise corrected objective

2007-01-23

2009-08-18

Collins, Darryl J (Department: 2873)

Optical: systems and elements

Miscellaneous

C359S650000, C359S900000

Reexamination Certificate

active

07576934

ABSTRACT:
An objective and method of fabricating an objective, particularly a projection objective for microlithography, comprising a plurality of optical elements. In one example, the method comprises acts of determining groups of optically similar optical elements or surfaces having at least two members, determining wave front deformations by the optical elements or surfaces, determining the necessary corrections for the optical elements or surfaces of a group, and performing the corrections for a group at a group member.

REFERENCES:
patent: 5696631 (1997-12-01), Hoffman
patent: 6268903 (2001-07-01), Chiba
patent: 6678240 (2004-01-01), Geh et al.
patent: 6934011 (2005-08-01), Geh et al.
patent: 2005/0254042 (2005-11-01), Geh et al.
patent: 10146499 (2006-11-01), None

Affiliated with

Also associated with

Rating

Groupwise corrected objective does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Groupwise corrected objective, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Groupwise corrected objective will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4102379