Gridded susceptor

Details Gridded susceptor Gridded susceptor

2006-04-25

2006-04-25

Kackar, Ram N (Department: 1763)

Coating apparatus

Gas or vapor deposition

With treating means

C118S724000, C118S728000, C118S500000, C118S715000, C156S345510, C156S345520, C156S345530, C219S444100, C219S544000, C392S416000, C392S418000, C204S192100, C204S298010, C279S128000, C279S003000, C361S234000

Reexamination Certificate

active

07033445

ABSTRACT:
Susceptor designs are provided for controlling damage to wafers, particularly during cold wafer drops-off on a hot susceptor. The designs include axisymmetric grid designs, such that thermal gradients are symmetrical in the circumferential (θ) direction and the same traversing any particular radial line. The grids are preferably arcuate and each have the same surface area. In one embodiment an outer zone is asymmetrically designed to induce predictable wafer curling in a saddle shape.

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