Gray scale microfabrication for integrated optical devices

Details Gray scale microfabrication for integrated optical devices Gray scale microfabrication for integrated optical devices

1994-03-04

1996-01-02

Bowers, Jr., Charles L.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making named article

345 14, 345129, 345132, 216 24, G02B 6136

Patent

active

054807646

ABSTRACT:
A monolithically integrated, micro-fabricated optical device for use in photonic applications has at least one waveguide surface configuration which cannot be fabricated by binary processing. The optical device comprises a plurality of layers of substrate materials. The material in at least one layer has an index of refraction different from the index of retraction of the material in an adjacent layer. A waveguide surface is formed at an interface between the layers and has a configuration fabricated by use of a gray scale mask.

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