Gray scale mask

Details Gray scale mask Gray scale mask

2011-03-01

2011-03-01

Rosasco, Stephen (Department: 1721)

Radiation imagery chemistry: process, composition, or product th

Radiation modifying product or process of making

Radiation mask

C438S149000

Reexamination Certificate

active

07897300

ABSTRACT:
A scale mask comprises a U-shaped source mask region, a drain mask region with an end extending into the source mask region, and a U-shaped light-blocking bar arranged between the source mask region and the drain mask region. Slits are formed between the source mask region and the light-blocking bar and between the light-blocking bar and the drain mask region, respectively, and first compensating regions are provided at inner sides of ends of the source mask region.

REFERENCES:
patent: 6255130 (2001-07-01), Kim
patent: 6876428 (2005-04-01), Kwak et al.
patent: 7435513 (2008-10-01), Cote et al.
patent: 2008/0073718 (2008-03-01), Lee et al.
patent: 101013705 (2007-08-01), None
English Abstract of Chinese Application 101013705 A Published Aug. 8, 2007.

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