Gray scale etching for thin flexible interposer

Details Gray scale etching for thin flexible interposer Gray scale etching for thin flexible interposer

1998-02-11

2000-12-05

Duda, Kathleen

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making electrical device

430318, 216 83, 438745, 438754, G03F 700

Patent

active

061564842

ABSTRACT:
Disclosed is a sculpted probe pad and a gray scale etching process for making arrays of such probe pads on a thin flexible interposer for testing the electrical integrity of microelectronic devices at terminal metallurgy. Also used in the etching process is a novel fixture for holding the substrate and a novel mask for 1-step photolithographic exposure. The result of the invention is an array of test probes of preselected uniform topography, which make ohmic contact at all points to be tested simultaneously and nondestructively.

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