Graphoepitaxy by encapsulation

Details Graphoepitaxy by encapsulation Graphoepitaxy by encapsulation

1984-12-10

1986-01-21

Bernstein, Hiram H.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

148DIG152, C30B 108

Patent

active

045655995

ABSTRACT:
Improvements on the graphoepitaxial process for obtaining epitaxial or preferred orientation films are described wherein a cap of material is formed over the film to be oriented, artificial surface-relief structure may be present in the substrate, the cap, or both, and the film may be heated by irradiation with electromagnetic radiation.

REFERENCES:
patent: 3585088 (1971-06-01), Schwuttke et al.
patent: 4059461 (1977-11-01), Fan et al.
patent: 4174422 (1979-11-01), Matthews
patent: 4333792 (1982-06-01), Smith
Gibbons, Appl. Phys. Lett. 6/15/79, pp. 831-832.
Billings, J. Vac Science and Technology V.6, p. 757 (1969).

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