Goniometer stage

Details Goniometer stage Goniometer stage

1986-12-24

1988-09-13

Fields, Carolyn E.

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

250311, 2504911, 2504401, G21K 508

Patent

active

047711787

ABSTRACT:
A goniometer stage has a tilting axis which can be adjusted to the point of intersection of the optical axis of the objective lens with the focusing plane. A bearing sleeve for a specimen holder rod is seated with its inner end in a ball-like inner bearing and is connected on its outer end with a cylinder of the tilting device via decoupled positioning devices. The rotational movement of the tilting device is transmitted directly, via a metal bellows from the cylinder to the bearing sleeve.

REFERENCES:
patent: 3823321 (1974-07-01), Von Rauch
patent: 3887811 (1975-06-01), Livesay
patent: 4058731 (1977-11-01), Muller et al.
patent: 4405865 (1983-09-01), Genty et al.

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