Gettering enclosure for a semiconductor device

Details Gettering enclosure for a semiconductor device Gettering enclosure for a semiconductor device

1997-10-01

1999-07-27

Whitehead, Jr., Carl

Active solid-state devices (e.g., transistors, solid-state diode

Housing or package

With desiccant, getter, or gas filling

257798, 257 81, H01L 2320

Patent

active

059295155

ABSTRACT:
Gettering enclosures for semiconductor packages, comprising an enclosure having a cavity for accommodating a semiconductor device; a gettering chamber (disposed above the semiconductor device) communicating with the cavity, comprising a getter precursor secured to the cavity and spaced from a wall of the cavity, wherein the wall is transparent to laser light so as to allow a beam of laser light to strike the getter precursor and sputter same on the walls of the gettering chamber.

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