Geometric autogeneration of"hard"phase-shift designs for VLSI

Details Geometric autogeneration of"hard"phase-shift designs for VLSI Geometric autogeneration of"hard"phase-shift designs for VLSI

1995-05-12

1997-06-03

Teska, Kevin J.

Boots, shoes, and leggings

364488, 364489, 364491, 395500, 395919, 395920, G06F 1500, G06F 300

Patent

active

056361319

ABSTRACT:
An apparatus implemented in a computer aided design (CAD) system automatically generates phase shifted mask designs for very large scale integrated (VLSI) chips from existing circuit design data. The system uses a series of basic geometric operations to design areas requiring phase assignment, resolve conflicting phase assignments, and eliminate unwanted phase edges. This apparatus allows automatic generation of phase shift mask data from any circuit design that allows for phase shifting. Since the dimensional input for all geometric operations is directly linked to the design ground rules given to the circuit designers, any designable circuit layout can also be phase shifted with this algorithm. The autogeneration of phase shift patterns around an existing circuit design is broken down into four major tasks: 1. Define areas that need a phase assignment; 2. Make a first pass phase assignment unique to each critical feature and define "runs" of interrelated critical features; 3. Propagation phase assignment through the "runs"; and 4. Design trim features.

REFERENCES:
patent: 4700317 (1987-10-01), Watanabe et al.
patent: 4902899 (1990-02-01), Lin et al.
patent: 5246800 (1993-09-01), Muray
patent: 5249135 (1993-09-01), Fujita
patent: 5286581 (1994-02-01), Lee
patent: 5326979 (1994-07-01), Kawasaki et al.
patent: 5358806 (1994-10-01), Haraichi et al.
patent: 5537648 (1996-07-01), Liebmann et al.

Affiliated with

Also associated with

Rating

Geometric autogeneration of"hard"phase-shift designs for VLSI does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Geometric autogeneration of"hard"phase-shift designs for VLSI, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Geometric autogeneration of"hard"phase-shift designs for VLSI will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-396325