Generic interface for an optical metrology system

Optics: measuring and testing – By polarized light examination – Of surface reflection

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C356S601000, C356S625000, C250S559190, C250S559220, C702S155000

Reexamination Certificate

active

07064829

ABSTRACT:
An optical metrology system includes a photometric device with a source configured to generate and direct light onto a structure, and a detector configured to detect light diffracted from the structure and to convert the detected light into a measured diffraction signal. A processing module of the optical metrology system is configured to receive the measured diffraction signal from the detector to analyze the structure. The optical metrology system also includes a generic interface disposed between the photometric device and the processing module. The generic interface is configured to provide the measured diffraction signal to the processing module using a standard set of signal parameters. The standard set of signal parameters includes a reflectance parameter that characterizes the change in intensity of light when reflected on the structure and a polarization parameter that characterizes the change in polarization states of light when reflected on the structure.

REFERENCES:
patent: 4878179 (1989-10-01), Larsen et al.
patent: 5864633 (1999-01-01), Opsal et al.
patent: 6414302 (2002-07-01), Freeouf
patent: 6704661 (2004-03-01), Opsal et al.
patent: 2002/0033954 (2002-03-01), Niu et al.
patent: 2003/0188580 (2003-10-01), Doddi et al.
PCT International Search Report mailed Mar. 10, 2005 for PCT application PCT/US04/08748, filed Mar. 22, 2004.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Generic interface for an optical metrology system does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Generic interface for an optical metrology system, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Generic interface for an optical metrology system will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-3645187

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.