Optics: measuring and testing – By polarized light examination – Of surface reflection
Reexamination Certificate
2006-06-20
2006-06-20
Toatley, Jr., Gregory J. (Department: 2877)
Optics: measuring and testing
By polarized light examination
Of surface reflection
C356S601000, C356S625000, C250S559190, C250S559220, C702S155000
Reexamination Certificate
active
07064829
ABSTRACT:
An optical metrology system includes a photometric device with a source configured to generate and direct light onto a structure, and a detector configured to detect light diffracted from the structure and to convert the detected light into a measured diffraction signal. A processing module of the optical metrology system is configured to receive the measured diffraction signal from the detector to analyze the structure. The optical metrology system also includes a generic interface disposed between the photometric device and the processing module. The generic interface is configured to provide the measured diffraction signal to the processing module using a standard set of signal parameters. The standard set of signal parameters includes a reflectance parameter that characterizes the change in intensity of light when reflected on the structure and a polarization parameter that characterizes the change in polarization states of light when reflected on the structure.
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Bao Junwei
Jakatdar Nickhil
Li Shifang
Niu Xinhui
Morrison&Foerster LLP
Stock, Jr. Gordon J.
Timbre Technologies, Inc.
Toatley , Jr. Gregory J.
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