Generation of uniformly-distributed plasma

Details Generation of uniformly-distributed plasma Generation of uniformly-distributed plasma

2005-06-07

2005-06-07

Vo, Tuyet Thi (Department: 2821)

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Plasma generating

C315S111910, C204S298370

Reexamination Certificate

active

06903511

ABSTRACT:
Methods and apparatus for generating uniformly-distributed plasma are described. A plasma generator according to the invention includes a cathode assembly that is positioned adjacent to an anode and forming a gap there between. A gas source supplies a volume of feed gas and/or a volume of excited atoms to the gap between the cathode assembly and the anode. A power supply generates an electric field across the gap between the cathode assembly and the anode. The electric field ionizes the volume of feed gas and/or the volume of excited atoms that is supplied to the gap, thereby creating a plasma in the gap.

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