GeBPSG top clad for a planar lightwave circuit

Details GeBPSG top clad for a planar lightwave circuit GeBPSG top clad for a planar lightwave circuit

2008-05-13

2008-05-13

Coleman, W. David (Department: 2823)

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

Electromagnetic or particle radiation

C385S129000, C385S132000

Reexamination Certificate

active

11591085

ABSTRACT:
A method of depositing a top clad layer for an optical waveguide of a planar lightwave circuit. A GeBPSG top clad layer for an optical waveguide structure of a planar lightwave circuit is fabricated such that the top clad layer comprises doped silica glass, wherein the dopant includes Ge (Germanium), P (Phosphorus), and B (Boron). In depositing a top clad layer for the optical waveguide, three separate doping gasses (e.g., GeH4, PH3, and B2H6) are added during the PECVD (plasma enhanced chemical vapor deposition) process to make Ge, P and B doped silica glass (GeBPSG). The ratio of the Ge, P, and B dopants is configured to reduce the formation of crystallization areas within the top clad layer and maintain a constant refractive index within the top clad layer across an anneal temperature range. A thermal anneal process for the top clad layer can be a temperature within a range of 950 C to 1050 C. The GeBPSG top clad layer reduces the insertion loss of passive arrayed waveguide grating devices and active planar lightwave circuit devices.

REFERENCES:
patent: 4111525 (1978-09-01), Kaminow et al.
patent: 4327965 (1982-05-01), Black
patent: 4335934 (1982-06-01), Black et al.
patent: 5280535 (1994-01-01), Gfeller et al.
patent: 5408569 (1995-04-01), Nishimoto
patent: 5648175 (1997-07-01), Russell et al.
patent: 5663556 (1997-09-01), Wessels et al.
patent: 5678935 (1997-10-01), Sakata
patent: 5728605 (1998-03-01), Mizutani
patent: 5757540 (1998-05-01), Judkins et al.
patent: 5763081 (1998-06-01), Ohga et al.
patent: 5885881 (1999-03-01), Ojha
patent: 5904491 (1999-05-01), Ojha et al.
patent: 5930435 (1999-07-01), Laming et al.
patent: 5982973 (1999-11-01), Yan et al.
patent: 6058231 (2000-05-01), Haggans et al.
patent: 6108474 (2000-08-01), Eggleton et al.
patent: 6122429 (2000-09-01), Wessels et al.
patent: 6201918 (2001-03-01), Berkey et al.
patent: 6208792 (2001-03-01), Hwang et al.
patent: 6317444 (2001-11-01), Chakrabarti et al.
patent: 6615615 (2003-09-01), Zhong et al.
patent: 6705124 (2004-03-01), Zhong et al.
patent: 2002/0021882 (2002-02-01), Wyatt et al.
patent: 2002/0154878 (2002-10-01), Akwani et al.

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