Gas port sealing for CVD/CVI furnace hearth plates

Details Gas port sealing for CVD/CVI furnace hearth plates Gas port sealing for CVD/CVI furnace hearth plates

2005-01-25

2005-01-25

Lund, Jeffrie R. (Department: 1763)

Coating processes

Coating by vapor, gas, or smoke

Carbon or carbide coating

C029S428000, C432S003000

Reexamination Certificate

active

06846514

ABSTRACT:
A method and apparatus for sealing gas ports in CVD/CVI furnaces and processes is disclosed. A fluid direction nozzle (160) is positioned between a top lip (101) of a gas inlet port (100) delivering a reactant gas (G) to a furnace compartment(200) in a CVD/CVI furnace (10) and corresponding holes (151) of a CVD/CVI process apparatus such as a hearth plate (150). The fluid direction nozzle160reduces leakage of reactant gases (G) and ensures a smooth transition of gas flow direction between the gas inlet port (100) and the corresponding holes (151). CVD/CVI process times are significantly reduced with the use of the reusable/replaceable flow direction nozzles (160).

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