Gas partial pressure sensor for vacuum chamber

Details Gas partial pressure sensor for vacuum chamber Gas partial pressure sensor for vacuum chamber

1989-05-08

1991-01-29

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

250423R, 250423P, 356311, H01J 2700

Patent

active

049888714

ABSTRACT:
An optical partical pressure gas analyzer employs an electron beam to excite the outer electrons of gas atoms or molecules, and one or more photomultiplier tubes or other similar detectors to detect wavelengths of photons characteristic of the decay of the outer electrons of one or more species of gas molecules. The photomultiplier tubes have a viewing direction substantially at right angles to the electron beam. A Faraday trap or similar device is employed to minimize secondary electron generation. This-film interference filters are favorably employed to pass a specific characteristic wavelength of the desired species, and to reject other wavelengths. An electromechanical filter changer permits each photomultiplier tube to analyze and identify many gaseous species in the low pressure mixture. A thermal shield in the form of a low thermal mass, low thermal conductivity sleeve surround the interaction volume and isolates the electron beam generating gun from other more thermally massive elements, to facilitate rapid thermal stabilization after turn on.

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